High Q CMOS-MEMS resonators and its applications as RF tunable band-pass filters

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J.L. Lopez; J. Verd; J. Giner; A. Uranga; G. Murillo; E. Marigo; F. Torres; G. Abadal; N. Barniol (Profiled Authors: Gabriel Abadal Berini; Núria Barniol Beumala; Aranzazu Uranga Del Monte; Gonzalo Murillo Rodríguez; Francesc Torres Canals)

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009:557-560.

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Engineering & Physical Sciences

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