VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator

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J. Giner; A. Uranga; J.L. Muñoz-Gamarra; E. Marigó; N. Barniol (Profiled Authors: Núria Barniol Beumala; Aranzazu Uranga Del Monte)

Electronics Letters. 2012;48(9):514-516.

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Engineering & Physical Sciences

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